The researchers at Fraunhofer FEP took advantage of the versatility of the inline coating tool MAXI. Depending on the maturity of the process, the multifunctional vacuum coating plant offers the possibility to run processes in sheet-to-sheet as well as in roll-to-roll mode. Moreover, the variety of processes at the MAXI allows for pilot production, providing good prerequisites for the development and scaling of graphene deposition processes.
Dr Stefan Saager, group leader for coating metal and energy technology, explains: “Graphene can be deposited on metallic strips using the innovative PECVD process in the roll-to-roll mode. In the first step, the metal strip is coated with a thin layer of a catalyst material such as copper in vacuum. This allows the desired substrate material to be selected independently of the suitable catalyst material. The coated metal strip is then fed into a process unit containing an argon plasma. Its argon ions collide with the substrate and heat it in a very short time. By adding suitable precursor gases such as methane or acetylene, the respective molecules can be cracked into their constituents and partially ionised at the same time. Ideally, the resulting carbon atoms and ions are deposited on the substrate in a monolayer, well-ordered 2D structure, thus synthesising the desired layer of graphene.”
In the next step, the scientists at Fraunhofer FEP are going to work on the reproducibility of the results and on the further improvement of the layer properties, e. g. the number of graphene layers.